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Yang Liu
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Publications (1)
Proceedings Article | 10 December 2024 Paper
Frequency-domain modeling-free learning control for wafer stages with transient improvement by adaption
Pengyu Sun, Fazhi Song, Yang Liu, Jiubin Tan
Proceedings Volume 13423, 134231A (2024) https://doi.org/10.1117/12.3053096
KEYWORDS: Semiconducting wafers, Motion models, Systems modeling, Control systems, Signal to noise ratio, Feedback control, Matrices, Instrument modeling, Adaptive control, Sun
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