Mr. Yaniv Abramovitz Profile

Yaniv Abramovitz

at Applied Materials Israel Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 25 June 2020 Presentation + Paper

Accuracy assessment between on-product and on-optical-target overlay metrology with SEM and STEM

Yaniv Abramovitz, Guy Levin, Lior Sarig, Shimon Levi, Ofer Adan, Ashley Tilson, Jason Arjavac, Michael Strauss, Laurens Kwakman, Philippe Leray, Sandip Halder

Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

KEYWORDS: Wafer-level optics, Metrology, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Dysprosium, Line edge roughness, Semiconducting wafers, Overlay metrology, Scanning transmission electron microscopy

Read Abstract +

Proceedings Article | 24 March 2020 Presentation + Paper

Accelerating on-device overlay metrology accuracy verification

Yaniv Abramovitz, Lior Sarig, Guy Levin, Shimon Levi, Ron Davidescu, Daniel Harel, Ofer Adan, Philippe Leray, Sandip Halder

Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

KEYWORDS: Wafer-level optics, Metrology, Etching, Scanning electron microscopy, Transmission electron microscopy, Photomasks, Semiconducting wafers, Overlay metrology

Read Abstract +

Proceedings Article | 8 March 2016 Paper

Metrology target design (MTD) solution for diagonally orientated DRAM layer

Myungjun Lee, Mark Smith, Michael Adel, Chia-Hung Chen, Chin-Chang Huang, Hao-Lun Huang, Hsueh-Jen Tsai, I-Lin Wang, Jen-Chou Huang, Jo-Lan Chin, Kuo-Yao Chou, Yuan-Ku Lan, Hsien-Yen Lung, Jui-Chin Yang, Tal Itzkovich, Healthy Huang, Yaniv Abramovitz, Jinyan Song, Chen Dror, Harvey Cheng, Ady Levy

Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX

KEYWORDS: Lithography, Metrology, Lithographic illumination, Scanners, Photomasks, Optical proximity correction, SRAF, Neodymium, Overlay metrology, Personal protective equipment

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years