Dr. Yiping Xu Profile

Dr. Yiping Xu

Senior Vice President & CTO at Raintree Technologies Corp

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Author

Publications (9)

Proceedings Article | 8 March 2016 Paper

Sensitivity study and parameter optimization of OCD tool for 14nm finFET process

Zhensheng Zhang, Huiping Chen, Shiqiu Cheng, Yunkun Zhan, Kun Huang, Yaoming Shi, Yiping Xu

Proceedings Volume 9778, 97783A (2016) https://doi.org/10.1117/12.2219109

KEYWORDS: Process control, Metrology, Scatterometry, Critical dimension metrology, Precision measurement, Light scattering, Signal processing, Semiconductors, Measurement devices

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Proceedings Article | 2 June 2000 Paper

Manufacturing considerations for implementation of scatterometry for process monitoring

John Allgair, David Benoit, Robert Hershey, Lloyd Litt, Ibrahim Abdulhalim, William Braymer, Michael Faeyrman, John Robinson, Umar Whitney, Yiping Xu, Piotr Zalicki, Joel Seligson

Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386465

KEYWORDS: Scatterometry, Reflectivity, Scanning electron microscopy, Critical dimension metrology, Metrology, Silicon, Atomic force microscopy, Manufacturing, Process control, Semiconducting wafers

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Proceedings Article | 23 June 1995 Paper

Surface profile measurement of thin film using phase-shifting interferometry

Yiping Xu, Yuanjing Li

Proceedings Volume 2545, (1995) https://doi.org/10.1117/12.212652

KEYWORDS: Thin films, Silicon films, Phase measurement, Interferometry, Reflection, 3D metrology, Silicon, Phase interferometry, Profilometers, Thin film manufacturing

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Proceedings Article | 17 May 1994 Paper

Experimental study of phase-shifting mask defect detection using phase-shifting interferometry

Yiping Xu, Donald Cohen, John O'Connor, Kuo-Ching Liu, Martin Cohen

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175418

KEYWORDS: Defect detection, Quartz, Phase interferometry, Phase shifts, 3D metrology, Bridges, Phase shifting, Wavefronts, Profilometers, Objectives

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Proceedings Article | 1 May 1994 Paper

Effects of dissimilar materials on submicron linewidth measurements from phase images

Yiping Xu

Proceedings Volume 2196, (1994) https://doi.org/10.1117/12.174137

KEYWORDS: Phase measurement, Algorithm development, Reflectivity, Calibration, Algorithms, Coherent optics

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Proceedings Article | 10 December 1993 Paper

Simple and effective phase unwrapping technique

Yiping Xu, Chiayu Ai

Proceedings Volume 2003, (1993) https://doi.org/10.1117/12.165458

KEYWORDS: Phase shift keying, Modulation, Reflectivity, Interferometry, Fringe analysis, Wavefronts, Image segmentation, Phase shifts, Mathematical morphology, Sensors

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Proceedings Article | 23 September 1993 Paper

New realistic 3D surface microtopography visualization technique

Yiping Xu, Chiayu Ai

Proceedings Volume 1915, (1993) https://doi.org/10.1117/12.157039

KEYWORDS: Reflectivity, Phase shifts, Wavefronts, Phase interferometry, Visualization, Light sources, 3D modeling, 3D image processing, Microscopes, 3D visualizations

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Proceedings Article | 4 August 1993 Paper

Theoretical study and computer simulations of submicron linewidth measurement using optical phase-shifting interferometry

Yiping Xu

Proceedings Volume 1926, (1993) https://doi.org/10.1117/12.149009

KEYWORDS: Reflectivity, Phase interferometry, Wavefronts, Phase shifts, Diffraction, Phase measurement, Computer simulations, Signal to noise ratio, Optical testing, Monochromatic aberrations

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Proceedings Article | 1 June 1990 Paper

Precise alignment using optical phase-shifting technique

Yiping Xu

Proceedings Volume 1264, (1990) https://doi.org/10.1117/12.20188

KEYWORDS: Optical alignment, Phase shifts, Reflectivity, Signal detection, Reticles, Moire patterns, Optical lithography, Signal to noise ratio, Fourier transforms, Spatial filters

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Showing 5 of 9 publications

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