Prof. Yong Wang Profile

Prof. Yong Wang

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Publications (1)

Proceedings Article | 6 June 2024 Poster

The exploration of novel 3D lithography by utilizing the electron beam driving

Zhenjiang Li, Beining Li, Yanqing Wu, Renzhong Tai, Yong Wang

Proceedings Volume PC12995, PC129950F (2024) https://doi.org/10.1117/12.3017385

KEYWORDS: Lithography, Electron beams, Electron beam lithography, 3D printing, Printing, Extreme ultraviolet lithography, Additive manufacturing, X-rays, X-ray technology, X-ray optics

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