Mr. Yoshimasa Takeichi Profile

Yoshimasa Takeichi

EUVP Lab at ASET

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Publications (2)

Proceedings Article | 23 March 2006 Paper

High-precision (<1ppb/°C) optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

Yoshimasa Takeichi, Iwao Nishiyama, Naofumi Yamada

Proceedings Volume 6151, 61511Z (2006) https://doi.org/10.1117/12.656368

KEYWORDS: Extreme ultraviolet lithography, Glasses, Silica, Temperature metrology, Heterodyning, Interferometry, Interferometers, Metrology, Beam splitters, Prototyping

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Proceedings Article | 6 May 2005 Paper

High-precision optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

Yoshimasa Takeichi, Iwao Nishiyama, Naofumi Yamada

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.599400

KEYWORDS: Extreme ultraviolet lithography, Interferometers, Heterodyning, Temperature metrology, Metrology, Phase measurement, Quartz, Interferometry, Glasses, Thermography

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