Mr. Young-Doo Jeon Profile

Young-Doo Jeon

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 7 March 2008 Paper

90nm node contact hole patterning through applying model based OPC in KrF lithography

Young-Doo Jeon, Sang-Uk Lee, Jaeyoung Choi, Jeahee Kim, Jaewon Han

Proceedings Volume 6924, 69242W (2008) https://doi.org/10.1117/12.773075

KEYWORDS: Optical proximity correction, Lithography, Critical dimension metrology, Photomasks, Optical lithography, Lithographic illumination, Semiconducting wafers, Resolution enhancement technologies, Image processing, Scanners

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Proceedings Article | 5 April 2007 Paper

Enhanced hole shape of flash devices in ArF lithography by eliptical mask bias technique

Young-Doo Jeon, Sungho Jun, Jae-Hyun Kang, Sang-Uk Lee, Jeahee Kim, Keeho Kim

Proceedings Volume 6518, 65183W (2007) https://doi.org/10.1117/12.712016

KEYWORDS: Photomasks, Optical proximity correction, Optical lithography, Lithography, Diffraction, Data modeling, Process modeling, Optical properties, Semiconductor manufacturing, Bridges

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Proceedings Article | 6 May 2005 Paper

Line width variation with absorber thickness in extreme ultraviolet lithography

Young-Doo Jeon, Min-Ki Choi, Eun-Jin Kim, Jong-Sun Kim, Hye-Keun Oh

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.600406

KEYWORDS: Extreme ultraviolet lithography, Photomasks, Germanium, Chromium, Reflectivity, Near field, Absorption, Extreme ultraviolet, Multilayers, Lithography

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