Dr. Young-Keun Yoon
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 September 2014 Paper
Ute Buttgereit, Thomas Trautzsch, Min-ho Kim, Jung-Uk Seo, Young-Keun Yoon, Hak-Seung Han, Dong Hoon Chung, Chan-Uk Jeon, Gary Meyers
Proceedings Volume 9235, 92350B (2014) https://doi.org/10.1117/12.2065937
KEYWORDS: Computed tomography, Image processing, Critical dimension metrology, Logic devices, Optical proximity correction, Image analysis, Photomasks, Metrology, Logic, Printing

Proceedings Article | 1 October 2013 Paper
Young-Keun Yoon, Dong Chung, Min-Ho Kim, Jung-Uk Seo, Byung-Gook Kim, Chan-Uk Jeon, JiUk Hur, Wonil Cho, Tetsuya Yamamoto
Proceedings Volume 8880, 88801A (2013) https://doi.org/10.1117/12.2025694
KEYWORDS: Critical dimension metrology, Logic, Photomasks, Inspection, Cadmium, Metrology, Computer aided design, Logic devices, Semiconducting wafers, Wafer-level optics

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