In order to achieve aspheric high efficiency and low damage fabrication,and find the balance between damage and efficiency during the lapping, a SSD model based on fracture mechanics is given. Based on three body wear theory, a material removal model has been given. Based on the above two models, effective removal rate of damage model has been presented. The relationship between effective removal rate of damage and various factors has been analyzed by simulation. The effective removal rate of damage of diamond powder is smaller than the silicon carbide, so it is easy to achieve high efficiency and low damage fabrication. The presentation of effective removal rate of damage provide an evaluation criterion for aspheric high efficiency and low damage fabrication.
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