Mr. Yue Yang Profile

Yue Yang

at Siemens EDA

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Publications (2)

Proceedings Article | 23 September 2009 Paper

Model-based hints for litho-hotspots repair

Yue Yang, Marko Chew, Toshikazu Endo, Mark Simmons

Proceedings Volume 7488, 74883O (2009) https://doi.org/10.1117/12.829726

KEYWORDS: Model-based design, Resolution enhancement technologies, Lithography, Visualization, Photovoltaics, Optical components, Geometrical optics, Distributed computing, Photomasks, Integrated circuit design

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Proceedings Article | 23 September 2009 Paper

pRSM: models for model-based litho-hotspot repairs

Marko Chew, Toshikazu Endo, Yue Yang

Proceedings Volume 7488, 74883L (2009) https://doi.org/10.1117/12.829723

KEYWORDS: Data modeling, Error analysis, Model-based design, Calibration, Resolution enhancement technologies, Statistical modeling, Raster graphics, Lithography, Optical proximity correction, Visualization

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