Dr. Yurii V. Shevtsov
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 December 2019 Paper
O. Mkrtychev, V. Shemanin, Yu. Shevtsov
Proceedings Volume 11322, 1132221 (2019) https://doi.org/10.1117/12.2555980
KEYWORDS: Laser ablation, Polymers, Laser damage threshold, Laser processing, Hafnium, Silicon films, Silicon

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