Mr. Yuta Togashi Profile

Yuta Togashi

at Mitsubishi Gas Chemical Co Inc

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Publications (2)

Proceedings Article | 3 October 2018 Paper

EUV sensitizer for resists and spin-on-carbon materials

Takashi Sato, Yuta Togashi, Sachiko Shinjo, Takumi Toida, Takashi Makinoshima, Masatoshi Echigo

Proceedings Volume 10809, 108091X (2018) https://doi.org/10.1117/12.2323096

KEYWORDS: Extreme ultraviolet, Absorption, Transmittance, Chemical elements, Iodine, Extreme ultraviolet lithography, Mass attenuation coefficient, Resist chemistry

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Proceedings Article | 16 October 2017 Paper

Development of the negative-tone molecular resists for EB/EUVL having high EUV absorption capacity and molecular design method

Takashi Sato, Tomoaki Takigawa, Yuta Togashi, Takumi Toida, Masatoshi Echigo, Tetsuo Harada, Takeo Watanabe, Hiroto Kudo

Proceedings Volume 10450, 104501H (2017) https://doi.org/10.1117/12.2280514

KEYWORDS: Extreme ultraviolet, Absorption, Extreme ultraviolet lithography, Lithography

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