Japan Aerospace Exploration Agency, JAXA, and Nihon Dempa Kogyo Co., Ltd., NDK, developed an original QCM sensor system under wide temperature range named “Twin-QCM” for ground use since 2015, put on the market in 2017. Twin-QCM series has “Twin-CQCM” with built-in heater and “Twin-TQCM” with built-in peltier element. Twin-TQCM has an operational temperature limitation at low temperature caused by use of built-in peltier element. Since 2021, we have proceeded to initiate the development of advanced Twin-QCM aiming for flight and exploration. Then, we decided to develop a new version of Twin-TQCM which can be used under cryogenic temperature, i.e., lower than -80 degrees C, named “cryo-use Twin-TQCM (Engineering Model).” Then, we have planned to evaluate the performance of the Engineering Model in terms of deposition sensing. In this presentation, we will report the test results of the experiment for performance evaluation of cryo-use Twin-TQCM Engineering Model.
Molecular contamination phenomena depend on temperature. For example, the morphology of a contaminant can change from a uniform film to droplets. The authors believe that the surface morphology of thin-film contamination affects optical transmittance and reflectance of camera lenses and other sensors, so it is important to gain a better understanding of the morphology of contamination. The authors investigated a simple measurement technique to determine molecular contamination morphology in a vacuum and at low temperatures using a CMOS camera sensor chip. The CMOS camera operates down to −60°C, which covers our range of interest (i.e., from −60°C to room temperature). Furthermore, using a combination of the camera sensor and the optical measurement setup in a vacuum chamber, the morphology and optical transmittance were measured simultaneously. The advantages of the technique are that the equipment is inexpensive and can be installed in many chambers now in use.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.