Mr. Yutaro Sato Profile

Yutaro Sato

at Nippon Control System Corp

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Author

Publications (3)

Proceedings Article | 12 November 2024 Presentation + Paper

PEC parameter optimization for EUV short-range effect utilizing MPC model calibration techniques

Yohei Torigoe, Itaru Ono, Ahmad Syukri, Yutaro Sato, Sun Young Kim, Boram Lee, Sukho Lee, Eok Bong Kim, Sanghee Lee

Proceedings Volume 13216, 132160K (2024) https://doi.org/10.1117/12.3034490

KEYWORDS: Calibration, Backscatter, Critical dimension metrology, Photomasks, Mathematical optimization, Extreme ultraviolet, Mathematical modeling, Manufacturing

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Proceedings Article | 21 November 2023 Presentation + Paper

PEC-aware MPC for CD quality improvement

Soeun Shin, Boram Lee, Sukho Lee, Eok bong Kim, Mina Kim, Jin Choi, Sanghee Lee, Yutaro Sato, Ahmad Syukri, Itaru Ono, Yohei Torigoe

Proceedings Volume 12751, 127510V (2023) https://doi.org/10.1117/12.2687866

KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Scattering, Modeling, Mathematical optimization, Algorithm development, Point spread functions, Lithography, Backscatter, Semiconductors

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Proceedings Article | 3 October 2018 Paper

Applying MPC for EUV mask fabrication

Dai Tsunoda, Yohei Torigoe, Yutaro Sato, Masakazu Hamaji, Gek-Soon Chua, Christian Bürgel

Proceedings Volume 10810, 108101H (2018) https://doi.org/10.1117/12.2502068

KEYWORDS: Photomasks, Extreme ultraviolet, Etching, Calibration, Extreme ultraviolet lithography, Critical dimension metrology, Mask making

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