Dr. Zhao Chuan Lee
at Globalfoundries
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11614, 116140L (2021) https://doi.org/10.1117/12.2583839
KEYWORDS: Analog electronics, Design for manufacturing, Metals, Resistance, Capacitance, Databases, Back end of line, Tolerancing, Mirrors, Manufacturing

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 113280M (2020) https://doi.org/10.1117/12.2551945
KEYWORDS: Design for manufacturing, Analog electronics, Databases, Device simulation, Metals, Manufacturing, Transistors, Mirrors, Design for manufacturability, Amplifiers

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11328, 1132809 (2020) https://doi.org/10.1117/12.2551981
KEYWORDS: Design for manufacturing, Chromium, Lithography, Electronic design automation, Design for manufacturability, Metals, Standards development, Manufacturing, Computing systems, Semiconductor process technologies

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10962, 109620G (2019) https://doi.org/10.1117/12.2514769
KEYWORDS: Design for manufacturing, Analog electronics, Manufacturing, Chemical mechanical planarization, Design for manufacturability, Metals, Extremely high frequency, Yield improvement, Digital electronics, Transceivers

Proceedings Article | 20 March 2019 Presentation + Paper
Proceedings Volume 10962, 109620R (2019) https://doi.org/10.1117/12.2513655
KEYWORDS: Lithography, Data modeling, Machine learning, Feature extraction, Metals, Computer programming, Profiling, Neural networks, Calibration, Process modeling

Showing 5 of 8 publications
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