Dr. Zhixiong Xiao
at United Microelectronics Center Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 13 December 2024 Paper
Proceedings Volume 13499, 134990I (2024) https://doi.org/10.1117/12.3046706
KEYWORDS: Silicon, Tolerancing, Silicon nitride, Optical gratings, Manufacturing, Design, Teeth, Silicon photonics, Optical alignment, Etching

Proceedings Article | 12 March 2021 Paper
ZhiXiong Xiao, JunBo Feng, ZhiPeng Hu
Proceedings Volume 11763, 1176342 (2021) https://doi.org/10.1117/12.2586890

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