We present an ambient refractive index (RI) insensitive temperature sensor based on a Silicon-on-Insulator (SOI) ellipse stack major axis modulated photonic crystal (PC) nanobeam cavity (EPCNC). The PC nanobeam cavity is covered with SU-8 cladding to increase the temperature sensitivity by taking advantage of the relatively high thermooptic (TO) coefficient of SU-8 cladding. Three dimensional finite-difference time-domain (3D-FDTD) simulations are used for our analysis. The results show that the sensitivity of temperature sensing is -108.9pm/K. In particular, the proposed sensor not only achieves a competitive temperature sensitivity, but also eliminates the influence of ambient RI on sensing. Therefore, the proposed sensor is potentially a promising platform for future application of temperature sensing.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.