New compounds consisting of xanthenone and thioxanthenone derivatives are synthesized and the photophysical properties of the compounds are discussed in detail. The difference between singlet and triplet energies was obtained at 0.09 and 0.37 eV (at low temperature). Furthermore, the logarithm of the laser power versus the logarithm of the PL intensity showed a slope of less than 1, and the compounds exhibit thermally activated delayed fluorescence (TADF). In addition, the photoluminescence quantum yield of the spin-coated films was gained 51.83 and 41.22%, respectively. The powder X-ray diffraction of the grinded (under the force) compounds and also the PL spectrum of the compounds were shifted and the compounds were mechanochromic when the color of the compounds was changed. The ionization potential of the compounds showed (5.49 and 5.62 eV) that the compounds were well suited for using in the fabrication of OLED devices as an emitter layer. The performance of the OLEDs was investigated and the maximum brightness and external quantum efficiency were found to be 44573 cdm-2 and 12.61%, respectively.
The main aim of the paper is to prepare a nonporous aluminum oxide membrane which will be used as a micro/Nano filter in biomedical micro hydraulic device or system by using piezoelectric material actuator acting as a vibroactive member to excite the aluminum oxide membrane. In order to identify the aluminum oxide membrane could be used as active nano filter for filtration of any kind of particle membrane was excited at frequency range of 5 kHz to 100 kHz and the distribution of vibration on the membrane was presented in the paper. On the other hand, it is shown that this type of membrane could be used as a particle separation of fluid separation in the micro hydraulic devices in biomedical. Analysis of transportation of bioparticles through the membrane filter were analyzed using developed coherent optics principles.
Cantilever and membrane based sensors, which are capable of providing accurate detection of target analytes have been always an important research topic of medical diagnostics, food testing, and environmental monitoring fields. Here, the mechanical detection is achieved by micro- and nano-scale cantilevers for stress sensing and mass sensing, or micro- and nano-scale plates or membranes. High sensitivity is a major issue for the active element and it could be achieved via increased Q-factor. The ability to control the Q factor expands the range of application of the device and allows to achieve more accurate results. The aim of this paper is to investigate the mechanical and electrical properties, as well as, the ability to control the Q factor of the membrane with PZT nanocomposite. This multilayered membrane was formatted using the n-type <100> silicon substrate by implementing the Low Pressure Chemical Vapor Deposition (LPCVD), photolithography by using photomask with defined dimensions, deep etching, and e-beam evaporation techniques. Dynamic and electrical characteristics of the membrane were numerically investigated using COMSOL Multiphysics software. The use of the multilayered membrane can range from simple monitoring of particles concentration in a closed environment to inspecting glucose levels in human fluids (blood, tears, sweat, etc.).
A technique of computational image encryption and optical decryption based on computer generated holography and time-averaged moir´e is investigated in this paper. Dynamic visual cryptography (a visual cryptography scheme based on time-averaging geometric moir´e), Gerchberg–Saxton algorithm and 3D microstructure manufacturing techniques are used to construct the optical scheme. The secret is embedded into a cover image by using a stochastic moir´e grating and can be visually decoded by a naked eye. The secret is revealed if the amplitude of harmonic oscillations in the Fourier plane corresponds to an accurately preselected value. The process of the production of 3D microstructure is described in details. Computer generated holography is used in the design step and electron beam lithography is exploited for physical 3D patterning. The phase data of a complex 3D microstructure is obtained by Gerchberg-Saxton algorithm and is used to produce a computer generated hologram. Physical implementation of microstructure is performed by using a single layer polymethyl methacrylate as a basis for 3D microstructure. Numerical simulations demonstrate efficient applicability of this technique.
Microresonators are fundamental components integrated in hosts of MEMS applications: covering the automotive sector, the telecommunication industry, electronic equipment for surface/material characterization and motion sensing, and etc. The aim of this paper is to investigate the mechanical and electrical properties of PZT film fabricated with three binding materials: polyvinyl butyral (PVB), polymethyl methacrylate (PMMA) and polystyrene (PS) and to evaluate applicability in control of microresonators Q factor. Micro particles of PZT powder were mixed with 20% solution of PVB, PMMA and PS in benzyl alcohol. For investigation of mechanical and electrical properties multilayer cantilevers were made. Obtained PZT and polymer paste was screen printed on copper (thickness 40 μm) using polyester monofilament screen meshes (layer thickness 50 μm) and dried for 30 min at 100°C. Electric dipoles of the PZT particles in composite material were aligned using high voltage generator (5 kV) and a custom–made holder. Electric field was held for 30 min. Surfaces of the applied films were investigated by Atomic Force Microscope NanoWizard(R)3 NanoScience. Dynamic and electrical characteristics of the multilayer were investigated using laser triangular displacement sensor LK-G3000. The measured vibration amplitude and generated electrical potential was collected with USB oscilloscope PicoScope 3424. As the results showed, these cantilevers were able to transform mechanical strain energy into electric potential and, v.v. However, roughness of PZT coatings with PMMA and PS were higher, what could be the reason of the worse quality of the top electrode. However, the main advantage of the created composite piezoelectric material is the possibility to apply it on any uniform or non-uniform vibrating surface and to transform low frequency vibrations into electricity.
The aim of this paper is to develop and investigate MOEMS displacement-pressure sensor for biological information monitoring. Developing computational periodical microstructure models using COMSOL Multiphysics modeling software for modal and shape analysis and implementation of these results for design MOEMS displacement-pressure sensor for biological information monitoring was performed. The micro manufacturing technology of periodical microstructure having good diffraction efficiency was proposed. Experimental setup for characterisation of optical properties of periodical microstructure used for design of displacement-pressure sensor was created. Pulsating human artery dynamic characteristics in this paper were analysed.
Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.
The main focus of the paper is the development of technological route of the production of complex 3D microstructure,
from designing it by the method of computer generated holography till its physical 3D patterning by exploiting the
process of electron beam lithography and thermal replication which is used for biomedical application. A phase data of a
complex 3D microstructure was generated by using Gerchberg-Saxton algorithm which later was used to produce a
computer generated hologram. Physical implementation of microstructure was done using a single layer polymethyl
methacrylate (PMMA) as a basis for 3D microstructure, which was exposed using e-beam lithography system e-Line and
replicated, using high frequency vibration. Manufactured 3D microstructure is used for designing micro sensor for
biomedical applications.
Diffraction efficiency of grating, created by hot imprint process on the surface of polycarbonate is one of the parameters, which determines the quality of microstructure. Microstructures are replicated by using hot imprint process with and without high frequency excitation and during the quality investigation, diffraction efficiencies were measured on purpose to find microstructure of best possible optical quality, as well determine whether high frequency excitation and other process parameters during the process affect this parameter. Process parameters include: temperature, excitation frequency, force of mechanical load and duration of hot imprint process, the purpose is to determine the collection of parameters, which influences the diffraction efficiency most positively. The novel vibro active pad is proposed for microstructures replication. The main dynamical characteristics of the vibropad are presented in the paper.
Past few decades were concentrated on researches related to effective energy harvesting applied in modern technologies,
MEMS or MOEMS systems. There are many methods for harvesting energy as, for example, usage of electromagnetic
devices, but most dramatic changes were noticed in the usage of piezoelectric materials in small scale devices. Major
limitation faced was too small generated power by piezoelectric materials or high resonant frequencies of such smallscale
harvesters. In this research, novel composite piezoelectric material was created by mixing PZT powder with 20%
solution of polyvinyl butyral in benzyl alcohol. Obtained paste was screen printed on copper foil using 325 mesh
stainless steel screen and dried for 30 min at 100 °C. Polyvinyl butyral ensures good adhesion and flexibility of a new
material at the conditions that requires strong binding. Five types of a composite piezoelectric material with different
concentrations of PZT (40%, 50%, 60%, 70% and 80 %) were produced. As the results showed, these harvesters were
able to transform mechanical strain energy into electric potential and, v.v. In experimental setup, electromagnetic shaker
was used to excite energy harvester that is fixed in the custom-built clamp, while generated electric potential were
registered with USB oscilloscope PICO 3424. The designed devices generate up to 80 μV at 50 Hz excitation. This
property can be applied to power microsystem devices or to use them in portable electronics and wireless sensors.
However, the main advantage of the created composite piezoelectric material is possibility to apply it on any uniform or
nonuniform vibrating surface and to transform low frequency vibrations into electricity.
The well-known phase-shifting approach for three-dimensional surface measurement uses multiple fringe patterns along with the phase-shifting algorithm to obtain 3-D profiles with high accuracy though this approach is not applicable for dynamic object measurement techniques such as time-averaged holography and in cases when only a single interference fringe pattern is available. In this case the fringe tracing method can be used that is based on localization of centers of interference fringes. We propose a technique for the reconstruction of the contour map from fringe patterns which comprises standard image processing techniques and a scheme for reconstruction of the map of continuous curves from the binary matrix of pixels representing fringe centers. The approach of image division into grid cells is taken and such problems as derivation of approximate line equations in each cell using Hough transformation, grouping contacting cells into curves and interpolation between curves with fractures are solved. The functionality of this approach is demonstrated for a demanding optical image containing fractures and noise.
The aim of this paper was to create finite element model of the hot imprint process for analysis of the heating, imprinting
and demolding steps. Polycarbonate was modeled as elasto-plastic material, because it was analyzed below glassing
temperature. In general, the simulation model and numerical results provide a useful understanding of the fundamental
formation mechanism during the hot imprint process and serve as a useful guide for specifying the optimal processing
conditions for variety of hot imprint applications.
Low-cost effective characterization methodology was developed that allows indirect evaluation of mechanical,
geometrical and optical parameters of periodical microstructures in the cases when traditional measurement techniques
are not suitable. Proposed methods are applicable for optimization and control of technological processes.
Laser diffractometer is used in the experimental works for measurement of optical parameters of periodical
microstructure and estimation of geometrical parameters with an error of less than 5% by comparing theoretical and
experimental values of diffraction efficiencies of periodical microstructures. This method is suitable for geometry control
of periodical microstructures during all technological process.
Also an efficient method was developed that is capable to estimate with an error of 5% the depth of periodical microstructures, which have characteristic depths that are larger than the wavelength of coherent light used in the experiment.
Quality of periodical microstructures is sensitive to thermal conditions during replication process. Therefore an experimental setup based on Michelson interferometer was developed for the investigation of induced thermal deformation. The radius and stress kinetics could be analyzed for different thickness of coated polymer.
These are the problems that are considered in this paper.
Piezoelectric optical scanner is developed for multi-coordinate control of optical laser beam by excitation of
microstructures. The manufactured microstructure is the grating which implemented in piezoelectric optical scanner.
Such type of opto-micro-mechanical systems can be used for accurate angular or linear deflection of optical elements in
various optomechanical and optoelectronic systems. The operating principle of these devices is based on piezoelectric
effect and on conversion of high-frequency multi-dimensional mechanical oscillations of piezoelectric vibration
transducers into directional multi-coordinate motion of the optical elements in the measurement chain. The main
distinctive feature of such optical piezoelectric scanners is the combination of high micrometer range resolution with a
wide range of angular deflections of the scanning elements. The manufacturing process and visualization of the
microstructure were presented. The device consists of piezoelectric cylinder and a scanning element with three degrees
of freedom. The control model of this device was derived using simulation of the working regimes of optical scanner by
COMSOL Multiphysics software. Optical holography system was used to validate the result of simulation of
piezoelectric optical scanner and to test the functionality of piezoelectric optical scanner with implemented
microstructures.
KEYWORDS: Diffraction, Diffraction gratings, Scanning electron microscopy, Silicon, Reactive ion etching, Computer simulations, Geometrical optics, Microfluidics, Chemical elements, Chemical analysis
In the present research we have fabricated and investigated microfluidic device (system of periodic groves - diffraction
grating) employing contact photolithography combined with the reactive ion etching (RIE). Relative diffraction
efficiency of diffraction gratings (originally produced in silicon substrates) was measured experimentally and simulated
using linear dimensions of gratings defined by scanning electron microscopy (SEM). The main experimental results were
compared with the computer simulations where the standard software ("PCGrate-S 6.1") was employed to calculate
relative diffraction efficiency of diffraction gratings for the different wavelengths of visible light. Comparing two
evaluation methods: direct (electron microscopy) and indirect (relative diffraction efficiency measured at different angles
of incidence for the three wavelengths of light) we have demonstrated feasibility of optical methods in control of
geometrical dimensions of periodic structures at the microscopic range.
KEYWORDS: Digital holography, Holography, Holograms, Digital imaging, Motion models, Digital image correlation, Mirrors, Systems modeling, Beam splitters, Finite element methods
Development of hybrid numerical-experimental techniques is an important method of analysis used for interpretation and validation of experimental results. Laser holography is a powerful experimental technique for analysis of high frequency vibrations of the fluid, especially when the amplitudes of those vibrations are relatively small.
It is assumed that the angular frequency of excitation coincides with the eigenfrequency of the appropriate eigenmode and thus the eigenproblem is solved. The problem of fluid eigen-vibrations in axi-symmetric geometry according to the first harmonic in the circumferential direction is analyzed. This problem has a practical application in the analysis of transverse vibrations of the fluid in an axi-symmetric pipe. The numerical model is developed on the basis of the finite element model of the fluid and the method of analysis of the problems with axi-symmetric geometry. The irrotational motions of the ideal compressible fluid are analyzed.
The numerical model of the system is based on the approximation of nodal displacements via the shape functions. Thus the field of the amplitudes of the circumferential variation of the volumetric strain is calculated using the procedure of conjugate approximation. By using the procedure of conjugate approximation the amplitudes of circumferential variation of nodal volumetric strains for the eigenmodes are determined. The obtained field of volumetric strain is used in the numerical procedure for the construction of the digital holographic image.
Thus the calculation of the amplitudes of circumferential variation of nodal volumetric strains consists of two stages: 1) calculations using the displacement formulation for the first harmonic in the circumferential direction by the method of finite elements; 2) determination of the field of the amplitudes of the circumferential variation of the volumetric strain by using the procedure of conjugate approximation. The obtained nodal values of the amplitudes of the circumferential variation of the volumetric strain are used in the construction of the digital holographic images. For this purpose the Abel transform which is usually used in axi-symmetric problems is generalized for the problems with axi-symmetric geometry with the variation of displacements according to the first harmonic in the circumferential direction. On the basis of the generalized Abel transform the digital holographic images are constructed. The obtained digital holographic images are used in the hybrid experimental-numerical procedure for the determination of the correlation with the experimental holographic images.
The construction of digital images of isolines of directional derivatives of the deflection of the plate of microstructures builds the ground for hybrid numerical-experimental procedures and enables to analyse the experimental results with greater precision. The procedure for the generation of digital images of isolines of directional derivatives of the deflection of the eigenmodes of bending vibrations of the circular micro plate is developed. The displacement based FEM formulation is developed on the deflection derivatives digital image of isolines, while the smoothing procedure enables the generation of digital images on rather coarse conventional finite element meshes. The introduction of directional smoothing (radial or angular) enables to obtain digital images of isolines with higher precision, as one of the digital images requires only radial while the other only angular smoothing. Thus the smoothing in the unnecessary direction is avoided and does not influence the image. The plotting procedure for the isolines of the directional derivatives of the circular plate is developed in order to obtain more precise images for the characterization dynamics of the microstructures.
In this work we report stress kinetics of thermoplastic polymer mr-I 8020 on crystalline silicon during thermal exposure to the temperature ranges typically applied in the imprint experiment. Stress kinetics in the polymer-silicon structure was measured experimentally in-situ using a Michelson interferometer and controlling temperature of the structure by thermocouple. The changes of radius of curvature due to the thermal heating were measured by laser (λ=633nm) interferometer and corresponding stress was calculated using a Stoney formula. It is shown that within the temperatures below the polymer glassing temperatures elastic response of the polymer dominates for different time of heating and cooling.
We present an optical laser-based method to visualize replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass, and in replicated polymer substrates) is measured experimentally and simulated using linear dimensions of gratings, or their replica defined by atomic force microscopy (AFM). Diffraction efficiency of the periodic structure is used to test the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with computer simulations where the standard program (PCGrate-SX6.0) is employed. Angular dependence of relative efficiency (RE) appears a versatile tool to analyze the process of origination and replication of diffraction grating in a micrometer range. Both the shape of the grating and linear dimensions can be reconstructed by comparing experimental values of relative efficiency with the simulation results. Examples of hot embossing of different periods of diffraction gratings to the Al/polymethyl methacrylate (PMMA) on polyethylene terephthalate (PET) illustrate vitality of such approach.
Ultrasonic motors have seen application in areas needing compact, efficient, and intermittent motion. Such applications include: camera auto focus lenses, watch motors, compact paper handling, microrobots, medicine and etc.. They are characterized by high torque at low rotational speed, simple mechanical design and good controllability. Compared with electromagnetic actuators, there is no danger of interference due to electromagnetic induction because no magnetic field is used and ultrasonic motors are more quiet since speed-reduction gears are not required.
A polarization vector of the piezoceramic element and location of excitation electrodes on its surface determine the resonance modes of the high frequency vibration exciter. In its turn the modes of vibration play a key role in the functionality of ultrasonic motor.
There are analyzed two different regimes of operation--when the contact zone of the resonator performs elliptic and unidirectional motions. Though the mechanical characteristics of the ultrasonic motor in both cases are comparable, detailed analysis of the contact surface shows very different wears.
Laser holography is used to identify and control the regimes of motion of actuator. Experimental results are compared with computer simulations. Contact surfaces are analyzed by atomic force microscope (AFM) before experiment, after 10 minutes and after 50 minutes of operation.
Recent technological advances have enabled the fabrication of mechanical resonators down to micrometer and even nanometer scales, with super high frequencies. One particularly interesting aspect of the physical behavior of microelectromechanical systems (MEMS) is their nonlinear mechanical response at relatively small deviations from equilibrium which is caused by nonlinear electromagnetic forces, nonlinear stiffness, heat transfer porperties. It is important to understand the nonlinear behavior of MEMS in order to improve their future designs. Hybrid numerical - experimental optical techniques are applied for holographic imaging and characterization of non-linearity in micro-mechanical relays, in particular their cantilevers. The apparent simplicity of the problem is misguiding due to non-linear interaction between the cantilever and the bottom electrode. Therefore the results of optical measurements of the cantilever dynamics are inaccurate due to the shift of the fringes in time average laser holographic interferograms. Numerical modeling helps to solve non-uniqueness of the inverse problem and to validate the interpretation of the pattern of fringes.
Due to relative ease and cost effectiveness with which planar polymeric structures can be fabricated, diffractive optical elements replication in polymeric substrates are receiving global attention for a myriad of planar photonic and optoelectronic applications including optical interconnects. In this work we present an optical laser control method to control replication of microperiodic profile structures in polymers. Diffraction efficiency of diffraction gratings (originally produced in silicon, quartz glass and in replicated polymer substrates) was measured experimentally and estimated using linear dimensions of gratings or replica defined by atomic force microscopy (AFM). Diffraction efficiency of periodic structure was used to control the surface relief formation during the combined ion etching of crystalline Si (100) and replication of this structure using UV light hardening and hot embossing. The main experimental results are compared with the computer simulations where the standard programme (PCGrate-SX6.0) was employed.
Vehicle interior acoustics became an important design criterion. Both legal restrictions and the growing demand for comfort, force car manufacturers to optimize the vibro-acoustic behavior of their products. The main source of noise is, of course, the engine, but sometimes some ill-designed cover or other shell structure inside the car resonates and makes unpredicted noise. To avoid this, we must learn the genesis mechanism of such vibrations, having as subject complex 3D shells. The swift development of computer technologies opens the possibility to numerically predict and optimize the vibrations and noises.
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