Infrared scenes generation technologies are used to simulate the infrared radiation characteristics of target and
background in the laboratory. They provide synthetic infrared imagery for thermal imager test and evaluation application
in the infrared imaging systems. At present, many Infrared scenes generation technologies have been widely used, and
they make a lot of achievements. In this paper, we design and manufacture one high performance IR scene generation
technology, and the whole thin film type transducer is the key, which is fabricated based on micro electro mechanical
systems (MEMS). The specific MEMS technological process parameters are obtained from a large number of
experiments.
The properties of infrared scene generation chip are investigated experimentally. It achieves high resolution, high
frame, and reliable performance, which can meet the requirements of most simulation system. The radiation coefficient
of the thin film transducer is measured to be 0.86. The frame rate is 160 Hz. The emission spectrum is from 2μm to
12μm in infrared band. Illuminated by the visible light with different intensities the equivalent black body temperature of
transducer could be varied in the range of 290K to 440K. The spatial resolution is more than 256×256.The geometric
distortion and the uniformity of the generated infrared scene is 5 percent. The infrared scene generator based on the
infrared scene generation chip include three parts, which are visual image projector, visual to thermal transducer and the
infrared scene projector. The experimental results show that this thin film type infrared scene generation chip meets the
requirements of most of hardware-in-the-loop scene simulation systems for IR sensors testing.
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