Joo Hoon Lee
at Samsung Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 April 2003 Paper
Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.468301
KEYWORDS: Etching, Polymers, Waveguides, Semiconducting wafers, Silica, Photomasks, Wave propagation, Oxygen, Silicon, Aluminum

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