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Ruichao Zhu
Sr Manufacturing Engineer Manager at Lumentum
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Publications (1)
Proceedings Article | 19 March 2015 Paper
Metrology of 50nm HP wire-grid polarizer: a SEM-scatterometry comparison
Ruichao Zhu, Alexander Munoz, S. R. Brueck, Shrawan Singhanl, S. Sreenivasan
Proceedings Volume 9424, 94241W (2015) https://doi.org/10.1117/12.2087273
KEYWORDS: Polarization, Scatterometry, Aluminum, Scanning electron microscopy, Silica, Polarizers, Etching, Reflection, Metrology, Scatter measurement
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