Mr. Wenqing Li Profile

Wenqing Li

at Beijing institute of Space Mechanics and Electricity

SPIE Involvement:

Author

Publications (2)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 8 July 2019 Paper

Study on surface roughness change of modified silicon carbide in ion beam polishing

Wenqin Li, Yonggang Wang, Xiaohui Meng, Jiyou Zhang

Proceedings Volume 11063, 110631F (2019) https://doi.org/10.1117/12.2540720

KEYWORDS: Silicon carbide, Ion beams, Polishing, Surface finishing, Mirrors, Surface roughness, Silicon, Laser systems engineering

Read Abstract +

The change of surface roughness of modified silicon carbide during ion beam polishing is introduced in this paper. Silicon carbide has been gradually applied to laxer mirrors due to its excellent physical properties. Ion beam polishing is a high precision and high certainty processing method, but it is not suitable to directly process silicon carbide body due to material reasons. First, the silicon carbide substrate material was modified by ion beam assisted deposition of silicon, and then the relationship between the depth of ion beam removal and the surface roughness evolution experiment was carried out. The experiment was divided into two stages. The first stage was to verify the quality of the modified layer, after a large number of processing and removal, to detect the change of the modified layer; the second stage was to find the change rule of the roughness, by adjusting the ion beam addition. In order to control the trend of roughness the basis of experiments, a Ф600mm modified silicon carbide plane mirror was fabricated by ion beam polishing. After two iterations, the processing results show that the surface roughness of the sample can be controlled within 2 nanometers(Sq value)by adjusting the processing strength and removal depth.

Proceedings Article | 19 October 2016 Paper

Ion beam figuring of Φ520mm convex hyperbolic secondary mirror

Xiaohui Meng, Yonggang Wang, Ang Li, Wenqing Li

Proceedings Volume 10154, 1015406 (2016) https://doi.org/10.1117/12.2243825

KEYWORDS: Ion beams, Mirrors, Aspheric lenses

Read Abstract +

The convex hyperbolic secondary mirror is a Φ520-mm Zerodur lightweight hyperbolic convex mirror. Typically conventional methods like CCOS, stressed-lap polishing are used to manufacture this secondary mirror. Nevertheless, the required surface accuracy cannot be achieved through the use of conventional polishing methods because of the unpredictable behavior of the polishing tools, which leads to an unstable removal rate. Ion beam figuring is an optical fabrication method that provides highly controlled error of previously polished surfaces using a directed, inert and neutralized ion beam to physically sputter material from the optic surface. Several iterations with different ion beam size are selected and optimized to fit different stages of surface figure error and spatial frequency components. Before ion beam figuring, surface figure error of the secondary mirror is 2.5λ p-v, 0.23λ rms, and is improved to 0.12λ p-v, 0.014λ rms in several process iterations. The demonstration clearly shows that ion beam figuring can not only be used to the final correction of aspheric, but also be suitable for polishing the coarse surface of large, complex mirror.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years