Advancing the capabilities of polymer blend directed self-assembly

Gregory S. Doerk; Aaron Stein; Suwon Bae; Marcus Noack; Masafumi Fukuto; Ashish A. Kulkarni; Kristof Toth; Chinedum Osuji; Kevin Yager

doi:10.1117/12.2660507

30 April 2023 Advancing the capabilities of polymer blend directed self-assembly

Gregory S. Doerk, Aaron Stein, Suwon Bae, Marcus Noack, Masafumi Fukuto, Ashish A. Kulkarni, Kristof Toth, Chinedum Osuji, Kevin Yager

Author Affiliations +

Proceedings Volume PC12497, Novel Patterning Technologies 2023; PC124970I (2023) https://doi.org/10.1117/12.2660507
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Polymer blending is a powerful approach to expand the nanopatterning landscape for block copolymer (BCP) directed self-assembly, itself a promising route to enhance resolution in established lithography techniques. However, investigating the vast and complex parameter spaces associated with blend self-assembly remains a daunting challenge. This talk will highlight examples where blending BCPs with homopolymers can dramatically speed up self-assembly kinetics for potential applications from nanophotonics to membrane synthesis, while blending two BCPs enables registered, template-responsive pattern selection. I will further describe ongoing efforts to accelerate investigations of blend formulation and processing using new combinatorial and autonomous methods.

Conference Presentation

Citation Download Citation

Gregory S. Doerk, Aaron Stein, Suwon Bae, Marcus Noack, Masafumi Fukuto, Ashish A. Kulkarni, Kristof Toth, Chinedum Osuji, and Kevin Yager "Advancing the capabilities of polymer blend directed self-assembly", Proc. SPIE PC12497, Novel Patterning Technologies 2023, PC124970I (30 April 2023); https://doi.org/10.1117/12.2660507

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