Fabrication And Evaluation Of A Monolithic InSb CID

David N. Pocock; Ichiro Kasai; David E. Nuttall; Chih-Hong Chen; Robert N. Ting

doi:10.1117/12.958485

7 May 1980 Fabrication And Evaluation Of A Monolithic InSb CID

David N. Pocock, Ichiro Kasai, David E. Nuttall, Chih-Hong Chen, Robert N. Ting

Proceedings Volume 0217, Advances in Focal Plane Technology; (1980) https://doi.org/10.1117/12.958485
Event: 1980 Los Angeles Technical Symposium, 1980, Los Angeles, United States

Abstract

The fabrication of a monolithic indium-antimonide 32 x 32 CID array applicable for staring infrared imaging sensors is presented with preliminary characterization results. The basic MIS technology utilizes low-temperature CVD to deposit insulating layers of nitrogen-doped Si0₂ on bulk indium-antimonide substrates. A two-level insulator/two-level metal structure results in a simple four-mask process flow for the CID array. Completed arrays demonstrate acceptable dark currents that result in 20 ms storage times at 77K and are completely photocurrent dominated for typical tactical background photon flux densities in the 10¹⁵ to 10¹⁶ photons/cm²s range. Charge transfer experiments indicate acceptable transfer efficiencies for CID operation. Plans to demonstrate thermal imagery are presented.

Citation Download Citation

David N. Pocock, Ichiro Kasai, David E. Nuttall, Chih-Hong Chen, and Robert N. Ting "Fabrication And Evaluation Of A Monolithic InSb CID", Proc. SPIE 0217, Advances in Focal Plane Technology, (7 May 1980); https://doi.org/10.1117/12.958485

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available