Paper
1 January 1981 Soft X-Ray And XUV Imaging With A Charge-Coupled Device (CCD)-Based Detector
N. G. Loter, P. Burstein, A. Krieger, D. Ross, D. Harrison, D. J. Michels
Author Affiliations +
Abstract
We have built and tested a soft X-ray/XUV imaging camera that uses a thinned, back-illuminated, all-buried channel RCA CCD for radiation sensing. The camera is a slow-scan device which allows frame integration if necessary. The detection characterics of the device have been tested over the 15-1500 eV range. The response was linear with exposure up to ~0.2-0.4 erg/cm2; saturation occurred for greater exposures. Attempts to resolve single photons with energies of 1.5 keV are described.
© (1981) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
N. G. Loter, P. Burstein, A. Krieger, D. Ross, D. Harrison, and D. J. Michels "Soft X-Ray And XUV Imaging With A Charge-Coupled Device (CCD)-Based Detector", Proc. SPIE 0290, Solid-State Imagers for Astronomy, (1 January 1981); https://doi.org/10.1117/12.965837
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Cited by 1 scholarly publication and 1 patent.
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KEYWORDS
Photons

Charge-coupled devices

Extreme ultraviolet

Signal attenuation

Sensors

X-rays

Aluminum

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