3-D Profile Detection Of Etched Patterns Using A Laser Scanner (3D-SCAN DETECTION) For Automatic Inspection Of Printed Circuit Boards

Moritoshi Ando; Kikuo Mita; Yoshikazu Kakinoki; Takefumi Inagaki

doi:10.1117/12.935024

3 October 1983 3-D Profile Detection Of Etched Patterns Using A Laser Scanner (3D-SCAN DETECTION) For Automatic Inspection Of Printed Circuit Boards

Moritoshi Ando, Kikuo Mita, Yoshikazu Kakinoki, Takefumi Inagaki

Author Affiliations +

Proceedings Volume 0389, Optical Systems Engineering III; (1983) https://doi.org/10.1117/12.935024
Event: 1983 Los Angeles Technical Symposium, 1983, Los Angeles, United States

Abstract

A new detection method named 3D-SCAN DETECTION has been developed. The method can detect three dimensional profiles of etched pattern on an inner layer of multilayer printed circuit boards (PC boards). In this system, one scanning of a laser beam allows the simultaneous detection of both top and bottom widths of an etched pattern (standard width and thickness: 100 x 35 μm) to within an accuracy of 10 pm. A prototype of 3D-SCAN DETECTION has been experimentally confirmed to have sufficient performance for the detection of such flaws as nicks in a copper pattern and poor spacing between adjacent conductors.

Citation Download Citation

Moritoshi Ando, Kikuo Mita, Yoshikazu Kakinoki, and Takefumi Inagaki "3-D Profile Detection Of Etched Patterns Using A Laser Scanner (3D-SCAN DETECTION) For Automatic Inspection Of Printed Circuit Boards", Proc. SPIE 0389, Optical Systems Engineering III, (3 October 1983); https://doi.org/10.1117/12.935024

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available