Effects Of Spatial Coherence Of Light Sources And Grating Gaps On The Quality Of Moire Signal Of Linear Grating Sensors

Rao Yun-jiang; Huang Shang-lian

doi:10.1117/12.952385

16 July 1986 Effects Of Spatial Coherence Of Light Sources And Grating Gaps On The Quality Of Moire Signal Of Linear Grating Sensors

Rao Yun-jiang, Huang Shang-lian

Author Affiliations +

Proceedings Volume 0599, Optics in Engineering Measurement; (1986) https://doi.org/10.1117/12.952385
Event: 1985 International Technical Symposium/Europe, 1985, Cannes, France

Abstract

In this paper, first, the insufficient of the metheds used to determinate light source's size and grating gaps in linear grating sensors is refered. Then, according to the general model of grating measurement systems, the complete expressions of moire intensity distribution are derived by means of partially coherent light theory. The effects of spatial coherence of light sources and grating gaps are particalarly discussed, too. In this paper, not only the simple and correct formulas and rule of determinating the modulation depth of moire signal and grating gaps are derived, but also it is proved that coherent light illumination is only one special case of this paper. In the end, an experiment whose results are fundamental in agreement with the theoretical analysis is presented. The conclusions of this paper are very important to design linear grating sensors and its formulas are very practical.

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Rao Yun-jiang and Huang Shang-lian "Effects Of Spatial Coherence Of Light Sources And Grating Gaps On The Quality Of Moire Signal Of Linear Grating Sensors", Proc. SPIE 0599, Optics in Engineering Measurement, (16 July 1986); https://doi.org/10.1117/12.952385

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