Angle-Scanning Laser Interferometer For Film Thickness Measurement

Piotr W. Kiedron

doi:10.1117/12.961153

5 August 1986 Angle-Scanning Laser Interferometer For Film Thickness Measurement

Piotr W. Kiedron

Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961153
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

A laser interferometer where intensity is measured as function of incidence angle is described. Number of fringes and/or their location in interferogram defines plastic film thickness. With simplest method of signal processing, thickness accuracy is within 2% for films over 50 micrometers. The fringe interval method improves accuracy to within 0.1% for films over 10 micrometers. Special least-square methods may improve accuracy further or even allow a simultaneous index of refraction and thickness measurement. The method is intended for industrial on-line monitoring of plastic film thickness.

Citation Download Citation

Piotr W. Kiedron "Angle-Scanning Laser Interferometer For Film Thickness Measurement", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961153

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