Ablation of Organic Materials with Excimer Lasers

Thomas Znotins; Darcy Poulin; John Reid

doi:10.1117/12.939680

6 April 1987 Ablation of Organic Materials with Excimer Lasers

Thomas Znotins, Darcy Poulin, John Reid

Author Affiliations +

Proceedings Volume 0737, New Developments and Applications in Gas Lasers; (1987) https://doi.org/10.1117/12.939680
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal process such as those associated with YAG or CO2 processing. This paper reviews the basic mechanisms associated with excimer laser ablation and presents examples of practical applications of this new technique.

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Thomas Znotins, Darcy Poulin, and John Reid "Ablation of Organic Materials with Excimer Lasers", Proc. SPIE 0737, New Developments and Applications in Gas Lasers, (6 April 1987); https://doi.org/10.1117/12.939680

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