The Measurement Of Cavity Spacing For Fabry-Perot Interferometer With High Accuracy

Wu Rul-Kun; Fang Zi-Wei

doi:10.1117/12.940447

6 November 1987 The Measurement Of Cavity Spacing For Fabry-Perot Interferometer With High Accuracy

Wu Rul-Kun, Fang Zi-Wei

Proceedings Volume 0776, Metrology of Optoelectronic Systems; (1987) https://doi.org/10.1117/12.940447
Event: 1987 Technical Symposium Southeast on Optics, Electro-Optics, and Sensors, 1987, Orlando, FL, United States

Abstract

We report here a method to measure the cavity spacing of a Fabry-Perot interferometers with error less than several tenth of wavelength. First the central fractional order was obtained from the interference pattern by a OMA system, which consists of diode array and microcomputer, for 32 different wavelength and He-Ne 6328 line . Than by using the method of excess fractions to process data the absolute interference order and the cavity spacing of Fabry-Perot was worked out from data corresponding to at least to 4 different wave-length. Further more , the relative reflection phase dispersion curve for silver Mirror was also obtained by the fitting data method.

Citation Download Citation

Wu Rul-Kun and Fang Zi-Wei "The Measurement Of Cavity Spacing For Fabry-Perot Interferometer With High Accuracy", Proc. SPIE 0776, Metrology of Optoelectronic Systems, (6 November 1987); https://doi.org/10.1117/12.940447

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