Multiple Imaging Using Two 1-D Phase Gratings With Uniformly Diffracted Spots

Zhen Wu; Ping Zhang; Yu Ruan

doi:10.1117/12.967375

1 January 1987 Multiple Imaging Using Two 1-D Phase Gratings With Uniformly Diffracted Spots

Zhen Wu, Ping Zhang, Yu Ruan

Proceedings Volume 0813, Optics and the Information Age; (1987) https://doi.org/10.1117/12.967375
Event: 14th Congress of the International Commission for Optics, 1987, Quebec, Canada

Abstract

Optical system that can produce multiple images of an object are specially useful for the microelectronics industry. It may replace costly and time-consuming step and repeat cameras. For this kind of optical system, the major problems are in achieving a high resolving power in images that can be a large size while keeping the distortion less than 2 %. Meanwhile, the positions of the multiple images in the array must be within submicron tolerances.

Citation Download Citation

Zhen Wu, Ping Zhang, and Yu Ruan "Multiple Imaging Using Two 1-D Phase Gratings With Uniformly Diffracted Spots", Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); https://doi.org/10.1117/12.967375

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