Comparison of ALD and IBS Al2O3 films for high power lasers

Hao Liu; Lars Jensen; Jürgen Becker; Marc Christopher Wurz; Ping Ma; Detlev Ristau

doi:10.1117/12.2245051

6 December 2016 Comparison of ALD and IBS Al₂O₃ films for high power lasers

Hao Liu, Lars Jensen, Jürgen Becker, Marc Christopher Wurz, Ping Ma, Detlev Ristau

Proceedings Volume 10014, Laser-Induced Damage in Optical Materials 2016; 1001421 (2016) https://doi.org/10.1117/12.2245051
Event: SPIE Laser Damage, 2016, Boulder, Colorado, United States

Abstract

Atomic layer deposition (ALD) has been widely studied in Micro-electronics due to its self-terminating property. ALD also grows film coatings with precise thickness and nodular-free structure, which are desirable properties for high power coatings. The depositing process was studied to produce uniform, stable and economic Al₂O₃ single layers. The layer properties relevant to high power laser industry were studied and compared with IBS Al₂O₃ single layers. ALD Al₂O₃ showed a stable growth of 0.104 nm/cycle, band gap energy of 6.5 eV and tensile stress of about 480 MPa. It also showed a low absorption at wavelength 1064 nm within several ppm, and LIDT above 30 J/cm². These properties are superior to the reference IBS Al₂O₃ single layers and indicate a high versatility of ALD Al₂O₃ for high power coatings.

Citation Download Citation

Hao Liu, Lars Jensen, Jürgen Becker, Marc Christopher Wurz, Ping Ma, and Detlev Ristau "Comparison of ALD and IBS Al₂O₃ films for high power lasers", Proc. SPIE 10014, Laser-Induced Damage in Optical Materials 2016, 1001421 (6 December 2016); https://doi.org/10.1117/12.2245051

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available