Design of real-time and high-precision photoelectric autocollimator

Siyu Zhou; Jiayin Hou; Shanshan Wang; Qiudong Zhu

doi:10.1117/12.2245392

31 October 2016 Design of real-time and high-precision photoelectric autocollimator

Siyu Zhou, Jiayin Hou, Shanshan Wang, Qiudong Zhu

Proceedings Volume 10019, Optoelectronic Devices and Integration VI; 100190G (2016) https://doi.org/10.1117/12.2245392
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

This paper presents the design of a real-time and high-precision photoelectric autocollimator. Firstly, a far exit pupil distance and no vignetting optical system is proposed. Compared with the conventional optical system of autocollimator, it solves the problem of ray cutting which results in the detection accuracy changed with the distance of target lens. Besiedes, it eliminates the influence of stray light. Then, the design of photoelectric detection system is discussed. It uses the specific multi-frame superposition denoising algorithm based on high speed CMOS camera which solves the conflict of improvement of accuracy and time-consuming of the algorithm. Finally, test results of the instrument are given. The measurement repeatability of the autocollimator can reach up to 0.01″ with the measurement range of 1200″ and the single measurement time is less than 17ms.

Citation Download Citation

Siyu Zhou, Jiayin Hou, Shanshan Wang, and Qiudong Zhu "Design of real-time and high-precision photoelectric autocollimator", Proc. SPIE 10019, Optoelectronic Devices and Integration VI, 100190G (31 October 2016); https://doi.org/10.1117/12.2245392

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