Accurate reconstruction in measurement of microstructures using digital holographic microscopy

Xiaolei Zhang; Xiangchao Zhang; Hong Xiao; Min Xu

doi:10.1117/12.2245027

24 November 2016 Accurate reconstruction in measurement of microstructures using digital holographic microscopy

Xiaolei Zhang, Xiangchao Zhang, Hong Xiao, Min Xu

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230O (2016) https://doi.org/10.1117/12.2245027
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Due to the limitation of traditional interferometry, digital holographic microscopy has attracted intensive attention for its capability of measuring complex shapes. However, speckles are inevitable in the recorded interferometric patterns, thereby polluting the reconstructed surface topographies. In this paper, a phase-shifting interferometer is built to realize the in-axis digital holographic microscopy. The anti-aliasing shift-invariant contourlet transform (ASCT) is used for reconstructing the measured surfaces. By avoiding subsampling in the scale and directional filtering schemes, the problems of frequency aliasing and phase distortion can be effectively solved. Practical experiments show that speckles can be recognized and removed straightforwardly. Therefore the proposed method has excellent performance for reconstructing structured surfaces.

Citation Download Citation

Xiaolei Zhang, Xiangchao Zhang, Hong Xiao, and Min Xu "Accurate reconstruction in measurement of microstructures using digital holographic microscopy", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230O (24 November 2016); https://doi.org/10.1117/12.2245027

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