Applications Of Laser Diodes In Interferometry

A. J. den Boef

doi:10.1117/12.949192

15 February 1989 Applications Of Laser Diodes In Interferometry

A. J. den Boef

Proceedings Volume 1010, Industrial Inspection; (1989) https://doi.org/10.1117/12.949192
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Two laser diode-based interferometers are described. The first one, which is only briefly described here, is a two-wavelength scanning spot interferometer employing two laserdiodes. This interferometer has been used for surface contouring with micrometer resolution. The second interferometer, which will be emphasised in this paper, is a heterodyne interferometer. This interferometer is particularly useful for surface profiling with nanometer resolution.

Citation Download Citation

A. J. den Boef "Applications Of Laser Diodes In Interferometry", Proc. SPIE 1010, Industrial Inspection, (15 February 1989); https://doi.org/10.1117/12.949192

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