A Flexible On-Line Correction Method For Automated Coating Processes

Jaap Leeuwenburgh; Harm Salomons; Andre de Geus

doi:10.1117/12.950023

27 February 1989 A Flexible On-Line Correction Method For Automated Coating Processes

Jaap Leeuwenburgh, Harm Salomons, Andre de Geus

Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950023
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

TO improve tne yiela or proauction or aielectric multilayer coatings an on-line correction method has been developed. Termination of the deposition of each individual layer using monochromatic optical monitoring, has been made adaptable to variations in the process. It is based on a method of on-line refractive index measurement. During deposition of the layer the required thickness is recalculated for the actual refractive index and the setting of the shutter is adjusted accordingly. The method allows to determine the index of single layers as well as more complex layer systems with arbitrary thicknesses. Combinations of test slides, or change of test slide after each layer, are possible. After deposition of each layer a process computer receives updated data for the type of material. Data for the next run are updated too. This paper gives an example of a multilayer anti-reflection coating generated by this process. Recorded process data are compared with data from inverse analyses of the spectral results. Coating results obtained with this method are compared with those of non-corrected runs.

Citation Download Citation

Jaap Leeuwenburgh, Harm Salomons, and Andre de Geus "A Flexible On-Line Correction Method For Automated Coating Processes", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); https://doi.org/10.1117/12.950023

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