Direct Writing Of Microcircuits By Laser-Assisted Processing Of Polymers

Christian Decker

doi:10.1117/12.950111

10 April 1989 Direct Writing Of Microcircuits By Laser-Assisted Processing Of Polymers

Christian Decker

Proceedings Volume 1022, Laser Assisted Processing; (1989) https://doi.org/10.1117/12.950111
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

A new method has been developed to produce conducting materials by surface chemical processing of a chlorinated polymer assisted by a CW laser. Polyvinylchloride (PVC) was first functionalized in order to absorb the 488.1 nm emission line of an argon ion laser. A short exposure of the polymer film to a 1 W laser beam, in the presence of air, leads to a complete removal of the chlorine and hydrogen atoms from the PVC backbone, with formation of a purely carbon material. The latter was shown to contain mainly graphite-type structures which are able to carry electrons, the electrical conductivity of the final product being comparable to that of graphite. Because of the high threshold energy of this solid state reaction, conventional radiation proved unable to induce the graphitization of PVC that occured within milliseconds under laser exposure, thus illustrating the unique possibilities of lasers for performing specific chemical reactions. By focusing the laser beam down into the micronic range, complex conductive patterns were directly drawn onto the photosensitive substrate at high speed. For practical applications of this laser writing technology in microelectronics, the delicate patterns were covered by a protective coating, using a photosensitive acrylic resin that hardens instantly under laser exposure, without affecting the electrical properties of the microcircuit.

Citation Download Citation

Christian Decker "Direct Writing Of Microcircuits By Laser-Assisted Processing Of Polymers", Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); https://doi.org/10.1117/12.950111

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available