Three-dimensional measurement based on a Greenough-type stereomicroscope using phase-shifting projection

Yan Hu; Qian Chen; Yuzhen Zhang; Tianyang Tao; Hui Li; Chao Zuo

doi:10.1117/12.2266712

10 February 2017 Three-dimensional measurement based on a Greenough-type stereomicroscope using phase-shifting projection

Yan Hu, Qian Chen, Yuzhen Zhang, Tianyang Tao, Hui Li, Chao Zuo

Author Affiliations +

Proceedings Volume 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016); 102501J (2017) https://doi.org/10.1117/12.2266712
Event: Fourth International Conference on Optical and Photonics Engineering, 2016, Chengdu, China

Abstract

We propose an absolute 3D micro surface profile measurement technique based on a Greenough-type stereomicroscope. The camera and the projector are fixed on the stereomicroscope, facilitating a flexible 3D measurement of objects with different heights. Experiments of both calibration and measurements are conducted, and the results show that our proposed method works well for measuring different types of geometry like spheres, ramps and planes etc. The reconstruction accuracy can achieve 4.8 μm with a measurement depth about 3 mm.

Citation Download Citation

Yan Hu, Qian Chen, Yuzhen Zhang, Tianyang Tao, Hui Li, and Chao Zuo "Three-dimensional measurement based on a Greenough-type stereomicroscope using phase-shifting projection", Proc. SPIE 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016), 102501J (10 February 2017); https://doi.org/10.1117/12.2266712

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