Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications

John A. Woollam; Blaine D. Johs; Craig M. Herzinger; James N. Hilfiker; Ron A. Synowicki; Corey L. Bungay

doi:10.1117/12.351660

19 July 1999 Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications

John A. Woollam, Blaine D. Johs, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, Corey L. Bungay

Proceedings Volume 10294, Optical Metrology: A Critical Review; 1029402 (1999) https://doi.org/10.1117/12.351660
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Variable angle spectroscopic ellipsometry (VASE) is important for metrology in several industries, and is a powerful technique for research on new materials and processes. Sophisticated instrumentation and software for VASE data acquisition and analysis is available for the most demanding research applications, while simple to use software enables the use of VASE for routine measurements as well. This article gives a basic introduction to the theory of ellipsometry, references “classic” papers, and shows typical VASE applications. In the following companion paper, more advanced applications are discussed.

Citation Download Citation

John A. Woollam, Blaine D. Johs, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, and Corey L. Bungay "Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications", Proc. SPIE 10294, Optical Metrology: A Critical Review, 1029402 (19 July 1999); https://doi.org/10.1117/12.351660

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