HyDra: A novel hydrodynamic polishing tool for high quality optical surfaces

Erika Sohn; Elfego Ruiz; Esteban Luna; Luis Salas; Manuel Nunez; Jorge Valdes; Benjamin Martinez; Irene Cruz-Gonzalez

doi:10.1117/12.605753

2 May 2005 HyDra: A novel hydrodynamic polishing tool for high quality optical surfaces; Techical Digest

Erika Sohn, Elfego Ruiz, Esteban Luna, Luis Salas, Manuel Nunez, Jorge Valdes, Benjamin Martinez, Irene Cruz-Gonzalez

Proceedings Volume 10315, Optifab 2005: Technical Digest; 1031504 (2005) https://doi.org/10.1117/12.605753
Event: Optifab 2005, 2005, Rochester, NY, United States

Abstract

A novel hydrodynamic radial polishing tool (HyDRa) is presented. It performs corrective lapping and fine polishing of diverse materials by means of a low-cost abrasive flux and a hydrostatic suspension system that avoids contact of the tool with the working surface. With this tool it is currently possible to polish aspheres and free-form optics of up to 2.5 meters in diameter. It has the advantage of avoiding fallen edges during the polishing process as well as reducing tool wear out and deformation. The functioning principle is based on the generation of a high-velocity, high-pressure abrasive emulsion flux with radial geometry. The polishing process is repeatable and achieves high degrees of precision and accuracy on optical and semiconductor surfaces. An additional advantage of this new tool is the possibility to perform in-process interferometric measurements. Recent results of polished aspheres are discussed.

Citation Download Citation

Erika Sohn, Elfego Ruiz, Esteban Luna, Luis Salas, Manuel Nunez, Jorge Valdes, Benjamin Martinez, and Irene Cruz-Gonzalez "HyDra: A novel hydrodynamic polishing tool for high quality optical surfaces; Techical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031504 (2 May 2005); https://doi.org/10.1117/12.605753

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