Absolute test using the conjugate differential method

Ya Huang; Jun Ma; Caojin Yuan; Lei Chen; Rihong Zhu; Zhishan Gao

doi:10.1117/12.2271978

26 June 2017 Absolute test using the conjugate differential method

Ya Huang, Jun Ma, Caojin Yuan, Lei Chen, Rihong Zhu, Zhishan Gao

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032929 (2017) https://doi.org/10.1117/12.2271978
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

The conjugate differential method has been applied to the absolute test of flat, cylindrical, and axicon surfaces. In the previous work, simulations and correspond experiments have been carried out to verify the feasibility of the method. To analyze the influences of different factors upon the measurement result, the conjugate differential method is discussed in detail. Considering the characteristics of the test surface such as surface types and surface profiles, the application ranges of the conjugate differential method are discussed into three parts. According to the three surface types using the conjugate differential method, the method can be extended to the absolute test of the spherical surfaces based on spherical coordinate system. The reconstructed errors caused by different aberrations expressed as Zernike polynomial terms show that they are more sensitive to high order aberration terms of the surface under test. And for surfaces with different frequency distributions, the surface with less mid-spatial frequency information is less sensitive to the sampling frequency. The influence from the other factors in interferometric test are also discussed into three parts. The influences from the uncertainty of shifts are correlated with the increased aperture diameters, since the integration error caused by the shift error increases gradually with the expanding of the integration path. The integration error changes by the influences from the coherent noise and pixel noise related to pixel deviations. The reconstructed deviations get increased while the peak pixel deviation is increasing. For the balance of the differential deviation and integration error, the optimization of sampling resolution should take considered for accuracy improvement.

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Ya Huang, Jun Ma, Caojin Yuan, Lei Chen, Rihong Zhu, and Zhishan Gao "Absolute test using the conjugate differential method", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032929 (26 June 2017); https://doi.org/10.1117/12.2271978

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KEYWORDS

Zernike polynomials

Spherical lenses

Axicons

Imaging systems

Spatial frequencies

Error analysis

Interferometry

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