The development of alignment turning system for precision len cells

Chien-Yao Huang; Cheng-Fang Ho; Jung-Hsing Wang; Chien-Kai Chung; Jun-Cheng Chen; Keng-Shou Chang; Ching-Hsiang Kuo; Wei-Yao Hsu; Fong-Zhi Chen

doi:10.1117/12.2273471

23 August 2017 The development of alignment turning system for precision len cells

Chien-Yao Huang, Cheng-Fang Ho, Jung-Hsing Wang, Chien-Kai Chung, Jun-Cheng Chen, Keng-Shou Chang, Ching-Hsiang Kuo, Wei-Yao Hsu, Fong-Zhi Chen

Author Affiliations +

Proceedings Volume 10371, Optomechanical Engineering 2017; 103710E (2017) https://doi.org/10.1117/12.2273471
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

In general, the drop-in and cell-mounted assembly are used for standard and high performance optical system respectively. The optical performance is limited by the residual centration error and position accuracy of the conventional assembly. Recently, the poker chip assembly with high precision lens barrels that can overcome the limitation of conventional assembly is widely applied to ultra-high performance optical system. ITRC also develops the poker chip assembly solution for high numerical aperture objective lenses and lithography projection lenses. In order to achieve high precision lens cell for poker chip assembly, an alignment turning system (ATS) is developed. The ATS includes measurement, alignment and turning modules. The measurement module including a non-contact displacement sensor and an autocollimator can measure centration errors of the top and the bottom surface of a lens respectively. The alignment module comprising tilt and translation stages can align the optical axis of the lens to the rotating axis of the vertical lathe. The key specifications of the ATS are maximum lens diameter, 400mm, and radial and axial runout of the rotary table < 2 μm. The cutting performances of the ATS are surface roughness Ra < 1 μm, flatness < 2 μm, and parallelism < 5 μm. After measurement, alignment and turning processes on our ATS, the centration error of a lens cell with 200mm in diameter can be controlled in 10 arcsec. This paper also presents the thermal expansion of the hydrostatic rotating table. A poker chip assembly lens cell with three sub-cells is accomplished with average transmission centration error in 12.45 arcsec by fresh technicians. The results show that ATS can achieve high assembly efficiency for precision optical systems.

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Chien-Yao Huang, Cheng-Fang Ho, Jung-Hsing Wang, Chien-Kai Chung, Jun-Cheng Chen, Keng-Shou Chang, Ching-Hsiang Kuo, Wei-Yao Hsu, and Fong-Zhi Chen "The development of alignment turning system for precision len cells", Proc. SPIE 10371, Optomechanical Engineering 2017, 103710E (23 August 2017); https://doi.org/10.1117/12.2273471

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