Measurement of low-order aberrations with an autostigmatic microscope

William P. Kuhn

doi:10.1117/12.2274813

22 August 2017 Measurement of low-order aberrations with an autostigmatic microscope

William P. Kuhn

Proceedings Volume 10377, Optical System Alignment, Tolerancing, and Verification XI; 103770C (2017) https://doi.org/10.1117/12.2274813
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

The addition of a piezo-electric focusing stage and phase retrieval algorithms to a compact, adaptable autostigmatic microscope provides for both improved focus sensitivity during optical system alignment as well as the ability to measure low-order aberrations for system qualification. A description of the instrument and initial results are reported.

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Citation Download Citation

William P. Kuhn "Measurement of low-order aberrations with an autostigmatic microscope", Proc. SPIE 10377, Optical System Alignment, Tolerancing, and Verification XI, 103770C (22 August 2017); https://doi.org/10.1117/12.2274813

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