Optical Neasurements Of Diamond-Turned Surfaces

Jacob Politch

doi:10.1117/12.951060

5 July 1989 Optical Neasurements Of Diamond-Turned Surfaces

Jacob Politch

Proceedings Volume 1038, 6th Mtg in Israel on Optical Engineering; (1989) https://doi.org/10.1117/12.951060
Event: Sixth Meeting of Optical Engineering in Israel, 1988, Tel Aviv, Israel

Abstract

We describe here a system for measuring very accurately diamond-turned surfaces. This system is based on heterodyne interfercmetry and measures surface height variations with an accuracy of 4A, and the spatial resolution is 1 micrometer. Fran the measured data we have calculated the statistical properties of the surface - enabling us to identify the spatial frequencies caused by the vibrations of the diamond - turning machine and the measuring machine as well as the frequency of the grid.

Citation Download Citation

Jacob Politch "Optical Neasurements Of Diamond-Turned Surfaces", Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); https://doi.org/10.1117/12.951060

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