X-ray multilayer mid-frequency characterizations using speckle scanning techniques

Hui Jiang; Shuai Yan; Dongxu Liang; Naxi Tian; Hua Wang; Aiguo Li

doi:10.1117/12.2272194

7 September 2017 X-ray multilayer mid-frequency characterizations using speckle scanning techniques

Hui Jiang, Shuai Yan, Dongxu Liang, Naxi Tian, Hua Wang, Aiguo Li

Proceedings Volume 10385, Advances in Metrology for X-Ray and EUV Optics VII; 103850Q (2017) https://doi.org/10.1117/12.2272194
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

Determination of multilayer structure was developed so much, but most of studies focused on the relationship between structural imperfections and reflectivity. These imperfections, whether interfacial roughness and interdiffusion or surface feature, measured by grazing X-ray scattering, atomic force microscopy or electric microscopy, reflect relatively high-frequency characteristics. The mid-frequency figure errors were regarded as the main factor to produce large satellite peaks near the focusing spot in the multilayer K-B mirror and were found to produce stripes in the far-field imaging. We report novel method to study mid-frequency interface and layer growth characterizations of multilayer structure using at-wavelength speckle scanning technique. This work is beneficial for matching multilayer manufacture technology to the optimization of beam performances.

Citation Download Citation

Hui Jiang, Shuai Yan, Dongxu Liang, Naxi Tian, Hua Wang, and Aiguo Li "X-ray multilayer mid-frequency characterizations using speckle scanning techniques", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850Q (7 September 2017); https://doi.org/10.1117/12.2272194

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available