Function follows form: combining nanoimprint and inkjet printing

M. Muehlberger; M. J. Haslinger; J. Kurzmann; M. Ikeda; A. Fuchsbauer; T. Faury; T. Koepplmayr; H. Ausserhuber; J. Kastner; C. Woegerer; D. Fechtig

doi:10.1117/12.2282503

28 September 2017 Function follows form: combining nanoimprint and inkjet printing

M. Muehlberger, M. J. Haslinger, J. Kurzmann, M. Ikeda, A. Fuchsbauer, T. Faury, T. Koepplmayr, H. Ausserhuber, J. Kastner, C. Woegerer, D. Fechtig

Author Affiliations +

Proceedings Volume 10446, 33rd European Mask and Lithography Conference; 104460Z (2017) https://doi.org/10.1117/12.2282503
Event: 33rd European Mask and Lithography Conference, 2017, Dresden, Germany

Abstract

We are investigating the possibilities and the technical requirements to do nanopatterning on arbitrary curved surfaces. This is done considering the opportunities and possibilities of additive manufacturing. One of the key elements is the necessity to deposit material in well-defined areas of various complex 3D objects. In order to achieve this we are developing a robot-based inkjet printing. We report on our progress with this respect and also on our efforts to perform nanoimprinting on curved, possibly 3D-printed objects using materials that can be deposited by inkjet printing. In the framework of this article, we provide an overview over our current status, the challenges and an outlook.

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M. Muehlberger, M. J. Haslinger, J. Kurzmann, M. Ikeda, A. Fuchsbauer, T. Faury, T. Koepplmayr, H. Ausserhuber, J. Kastner, C. Woegerer, and D. Fechtig "Function follows form: combining nanoimprint and inkjet printing", Proc. SPIE 10446, 33rd European Mask and Lithography Conference, 104460Z (28 September 2017); https://doi.org/10.1117/12.2282503

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