Paper
11 December 2017 Methods for improving the damage performance of fused silica polished by magnetorheological finishing
K. R. P. Kafka, B. Hoffman, S. Papernov, M. A. DeMarco, C. Hall, K. L. Marshall, S. G. Demos
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Abstract
The laser-induced damage threshold of fused-silica samples processed via magnetorheological finishing is investigated for polishing compounds depending on the type of abrasive material and the post-polishing surface roughness. The effectiveness of laser conditioning is examined using a ramped pre-exposure with the same 351-nm, 3-ns Gaussian pulses. Finally, we examine chemical etching of the surface and correlate the resulting damage threshold to the etching protocol. A combination of etching and laser conditioning is found to improve the damage threshold by a factor of ~3, while maintaining <1-nm surface roughness.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. R. P. Kafka, B. Hoffman, S. Papernov, M. A. DeMarco, C. Hall, K. L. Marshall, and S. G. Demos "Methods for improving the damage performance of fused silica polished by magnetorheological finishing", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044709 (11 December 2017); https://doi.org/10.1117/12.2281479
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Cited by 1 scholarly publication.
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KEYWORDS
Etching

Polishing

Magnetorheological finishing

Surface finishing

Silica

Surface roughness

Wet etching

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