Formation and characterization of porous SiC by anodic oxidation using potassium persulfate solution

Y. Iwasa; S. Kamiyama; M. Iwaya; T. Takeuchi; I. Akasaki

doi:10.1117/12.2283026

2 January 2018 Formation and characterization of porous SiC by anodic oxidation using potassium persulfate solution

Y. Iwasa, S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki

Proceedings Volume 10456, Nanophotonics Australasia 2017; 1045668 (2018) https://doi.org/10.1117/12.2283026
Event: SPIE Nanophotonics Australasia, 2017, Melbourne, Australia

Abstract

The formation process of porous SiC by anodic oxidation was investigated, aiming at the generation of pure white light with a high color rendering index (CRI) and high luminous efficiency. The efficiency of white light emission from porous SiC and its wavelength are strongly dependent on the porous structure such as the average pore size and porosity. In this study, we examined the structure and optical properties of porous SiC by adding potassium persulfate (K₂S₂O₈) as an oxidant in HF solution to control the porosity of porous SiC formed by anodic oxidation. By increasing the amount of the oxidant, we enhanced the integrated light emission intensity of porous SiC to 81 times that of bulk SiC. Through the study of porous SiC we demonstrated that the peak wavelength of the porous SiC could be controlled from 370 to 500 nm. Porous SiC created by anodic oxidation was thus proven to have great potential for realizing high-CRI white light generation using LEDs.

Citation Download Citation

Y. Iwasa, S. Kamiyama, M. Iwaya, T. Takeuchi, and I. Akasaki "Formation and characterization of porous SiC by anodic oxidation using potassium persulfate solution", Proc. SPIE 10456, Nanophotonics Australasia 2017, 1045668 (2 January 2018); https://doi.org/10.1117/12.2283026

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