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16 February 2018 Microfabrication of UV transparent fluoric polymer using a conventional pulsed green laser
M. Takeuchi, Y. Hanada
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Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 1051919 (2018) https://doi.org/10.1117/12.2286857
Event: SPIE LASE, 2018, San Francisco, California, United States
Abstract
We present the surface microfabrication of CYTOP, an amorphous UV transparent fluoric polymer, using a conventional pulsed green laser. Fluorine-based polymers have unique characteristics, including high transparency from the deep-UV to the IR wavelengths, chemical stability and low refractive indices, and thus are expected to have a number of industrial applications. However, CYTOP and other fluoric polymers are generally very difficult to microfabricate unless to use high particle beams. Therefore, we have developed a technique for the crack-free surface microfabrication of a CYTOP substrate based on ablation with a pulsed green laser followed by successive wet etching and annealing. In this work, the fundamental surface characteristics of the fabricated area were investigated. After the surface microfabrication of CYTOP, a three dimensional biochip was fabricated using a conventional PDMS bonding technique to demonstrate that a CYTOP biochip is superior to conventional transparent biochips with regard to the microscopic observation of cell motion.
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M. Takeuchi and Y. Hanada "Microfabrication of UV transparent fluoric polymer using a conventional pulsed green laser", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 1051919 (16 February 2018); https://doi.org/10.1117/12.2286857
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KEYWORDS
Polymers
Laser ablation
Microfabrication
Microfluidics
Pulsed laser operation
Fluorine
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