Paper
23 February 2018 Effects of polyimide layer under electrical contact pads on the response bandwidth of UTC-PD
Siwei Sun, Song Liang, Hongliang Zhu
Author Affiliations +
Abstract
We represent a high speed evanescently coupled waveguide UTC-PD. It is shown that a layer of polymer layer under the electrical pads can enlarge the response bandwidth of a UTC-PD greatly. The effects of the polymer layer are also studied with numerical simulations, which show the same trend.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Siwei Sun, Song Liang, and Hongliang Zhu "Effects of polyimide layer under electrical contact pads on the response bandwidth of UTC-PD", Proc. SPIE 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI, 105311S (23 February 2018); https://doi.org/10.1117/12.2295708
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Cited by 1 scholarly publication.
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KEYWORDS
Polymers

Waveguides

Palladium

Etching

Electrons

Indium gallium arsenide

Resistance

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