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The ESA Euclid mission is intended to explore the dark side of the Universe, particularly to understand the nature of the dark energy responsible of the accelerating expansion of the Universe. One of the two probes carried by this mission is the Baryonic Acoustic Oscillation (BAO) that requires the redshift measurements of millions of galaxies. In the Euclid design, these massive NIR spectroscopic measurements are based on slitless low resolution grisms. These grisms with low groove density and small blaze angle are difficult to manufacture by conventional replica process. Two years ago we started a CNES R&D program to develop grism manufacturing by the photolithographic process which is well adapted to coarse gratings. In addition, this original method allows introducing optical aberration correction by ruling curved and non-parallel grooves in order to simplify the instrument optical design. During the Euclid Phase A, we developed several prototypes of gratings made by photolithography. In this paper, we present the optical performance test results, including tests in the specific environment of the Euclid mission.
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